0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Lifting force (N) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Lifting force (N) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Lifting force (N) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Lifting force (N) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Lifting force (N) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Lifting force (N) 0 0.5 1 1.5 2 2.5 Time (sec.) Amplitude (mm) 0 0.5 1 1.5 2 2.5 Time (sec.) Amplitude (mm) 0 0.5 1 1.5 2 2.5 Time (sec.) Amplitude (mm) 0 0.5 1 1.5 2 2.5 Time (sec.) Amplitude (mm) 0 0.5 1 1.5 2 2.5 Time (sec.) Amplitude (mm) 0 0.5 1 1.5 2 2.5 Time (sec.) Amplitude (mm) 0.5 0.4 0.3 0.2 0.1 0 .0.1 .0.2 .0.3 .0.4 .0.5 0.5 0.4 0.3 0.2 0.1 0 .0.1 .0.2 .0.3 .0.4 .0.5 0.5 0.4 0.3 0.2 0.1 0 .0.1 .0.2 .0.3 .0.4 .0.5 0.5 0.4 0.3 0.2 0.1 0 .0.1 .0.2 .0.3 .0.4 .0.5 0.5 0.4 0.3 0.2 0.1 0 .0.1 .0.2 .0.3 .0.4 .0.5 0.5 0.4 0.3 0.2 0.1 0 .0.1 .0.2 .0.3 .0.4 .0.5 0 0.5 1 1.5 2 2.5 3 0 1 2 3 4 5 0 1 2 3 4 5 6 0 2 4 6 8 10 0 4 8 12 16 20 0 4 8 12 16 20 0.4 (MPa) 0.3 (MPa) 0.2 (MPa) 0.1 (MPa) 0.4 (MPa) 0.3 (MPa) 0.2 (MPa) 0.1 (MPa) 0.4 (MPa) 0.3 (MPa) 0.2 (MPa) 0.1 (MPa) 0.4 (MPa) 0.3 (MPa) 0.2 (MPa) 0.1 (MPa) 0.4 (MPa) 0.3 (MPa) 0.2 (MPa) 0.1 (MPa) 0.4 (MPa) 0.3 (MPa) 0.2 (MPa) 0.1 (MPa) Size: o40 Size: o60 Size: o80 Size: o100 Size: �ｭ120 Size: �ｭ150 Size: o40 Size: o60 Size: o80 Size: o100 Size: �ｭ120 Size: �ｭ150 Vibration [Bernoulli Type] Supply pressure: 0.1 MPa Lifting Force.Distance from the Workpiece [Bernoulli Type] * �ｮ155 solar cell is used for this data only. 13 Series XT661