R SEMI Thermo-chiller Series HRZ Ethylene Glycol Type Specifications (For details, please consult our “Product Specifications” information.) How to Order Ethylene Glycol Type HRZ 001 L 1 Symbol 001 002 004 008 Cooling capacity 1 kW 2 kW 4 kW 8 kW Cooling capacity Temperature range setting .20 to 40°C 20 to 90°C .20 to 90°C 1 kW �択� . 2 kW �択択� 4 kW �択� . 8 kW �択択� Symbol L H W Temperature range setting None Analog communication DeviceNet communication NPT fitting DI control kit Circulating fluid automatic recovery Nil C D N Y Z Option (Refer to pages 1342 and 1343.) Ethylene glycol type Note 1) It should have no condensation. Note 2) Dilute pure ethylene glycol with clear water. Additives such as preservatives cannot be used. Note 3) q Facility water temperature: 25°C, w Circulating fluid flow rate: Values at rated circulating fluid flow rate. Values common for 50/60 Hz. Note 4) Value with a stable load without turbulence in the operating conditions. It may be out of this range when a DI control kit (option Y) is used or in some other operating conditions. Note 5) The capacity at the Thermo-chiller outlet when the circulating temperature is 20°C. Note 6) Required flow rate for cooling capacity or maintaining the temperature stability. When used below the rated flow, use the individually sold, “By-pass Piping Set” (Refer to page 1339). Note 7) Minimum volume required for operating only the Thermo-chiller. (Circulating fluid temperature: 20°C, including the Thermo-chiller’s internal pipings or heat exchanger) Note 8) Preliminary space volume without main tank capacity. Available for collecting the circulating fluid inside an external piping or for preliminary injection. Note 9) Required flow rate when a load for the cooling capacity is applied at a facility water temperature of 25°C. Note 10) Weight in the dry state without circulating fluids Cooling method Refrigerant Control system Ambient temp./humidity Note 1) Weight Note 10) (kg) Safety standards Circulating fluid Note 2) Temp. range setting Note 1) (°C) Temp. stability Note 4) (°C) Cooling capacity Note 3) (kW) Heating capacity Note 3) (kW) Rated flow Note 6) (L/min) Main tank capacity Note 7) (L) Sub-tank capacity Note 8) (L) Port size Wetted parts material Temperature range (°C) Pressure range (MPa) Required flow rate Note 9) (50/60 Hz) (L/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm Communications Water-cooled refrigeration R404A (HFC) PID control Temperature: 10 to 35°C, Humidity: 30 to 70%RH 60% ethylene glycol aqueous solution ±0.1 0.25/0.40 (at 20 L/min) Approx. 15 Approx. 16 5/5 30 19 170 175 275 145 170 26 60 46 20 14 Refer to page 1338. Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 1336 and 1337.) UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) 30 23 6/6 15/22 18/23 3/4 5/6 9/10 13/14 5/7 13/14 Approx. 22 Approx. 17 20 Approx. 12 Approx. 15 Rc3/4 Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 10 to 25 0.3 to 0.7 Rc1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ±10% Approx. 15 Approx. 16 0.25/0.35 (at 20 L/min) 0.25/0.40 (at 20 L/min) .20 to 40 20 to 90 .20 to 90 1.0 (at .10°C) 2.0 (at .10°C) 1.0 (at 20°C) 2.0 (at 20°C) 4.0 (at 20°C) 8.0 (at 20°C) 2.0 (at 20°C) 8.0 (at 20°C) Model HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W1 HRZ008-W1 4.0 (at .10°C) 8.0 (at .10°C) 2.5 (at .10°C) 2.9 (at .10°C) 1.8 (at 20°C) 2.1 (at 20°C) 2.5 (at 20°C) 3.0 (at 20°C) 2.2 (at 20°C) 3.3 (at 20°C) 3.4 (at .10°C) 6.1 (at .10°C) Pump capacity Note 5) (50/60 Hz) (MPa) Electrical system Cooling water system Circulating fluid system 1327 HRG HRS HRZD HRW HEC HEB HED HEA IDH HRZ