R SEMI Specifications How to Order Thermo-chiller Series HRZ Double Inverter Type Double Inverter Type HRZ 010 W S Symbol 010 Cooling capacity 10 kW Cooling capacity Circulating fluid type Fluorinated fluids Ethylene glycol aqueous solution Clear water/Deionized water Temperature range setting .20 to 90°C .20 to 90°C 10 to 60°C Symbol Nil 1 2 Circulating fluid type Double inverter type None Analog communication DeviceNet communication NPT fitting DI control kit Circulating fluid automatic recovery Nil C D N Y. Z Option (Refer to pages 1342 and 1343.) . Not equipped to the fluorinated fluid type. Note 1) It should have no condensation. Note 2) Fluorinert. is a trademark of 3M and GALDENR is a registered trademark of Solvay Solexis, Inc. Dilute pure ethylene glycol with clear water. Additives such as preservatives cannot be used. If clear water or deionized water is used, please use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994/cooling water system - circulation type - make-up water). The minimum electrical conductivity of the deionized water used as the fluid should be 0.5 μS/cm (or electrical resistivity 2 MΩ�縦m at maximum). Note 3) q Facility water temperature: 25°C, w Circulating fluid flow rate: Values at rated circulating fluid flow rate. Values common for 50/60 Hz. Note 4) Valuee with a stable load without turbulence in the operating conditions. It may be out of this range when a DI control kit (option Y) is used or in some other operating conditions. Note 5) The capacity at the Thermo-chiller outlet when the circulating fluid temperature is 20°C. Note 6) Required flow rate for cooling capacity or maintaining the temperature stability. When used below the rated flow, use the individually sold, “By-pass Piping Set” (Refer to page 1339). Note 7) May not be able to control with the set value depending on the piping specification in the customer side. Note 8) Minimum volume required for operating only the Thermo-chiller. (Circulating fluid temperature: 20°C, including the Thermo-chiller’s internal pipings or heat exchanger) Note 9) Preliminary space volume without main tank capacity. Available for collecting the circulating fluid inside an external piping or for preliminary injection. Note 10) Required flow rate when a load for the cooling capacity is applied at a facility water temperature of 25°C. Note 11) Weight in the dry state without circulating fluids Cooling method Refrigerant Control system Ambient temperature/humidity Note 1) Circulating fluid Note 2) Temperature range setting Note 1) (°C) Cooling capacity Note 3) (kW) Heating capacity Note 3) (kW) Temperature stability Note 4) (°C) Pump capacity Note 5) (MPa) Rated flow Note 6) (L/min) Flow range Note 7) (L/min) Main tank capacity Note 8) (L) Sub-tank capacity Note 9) (L) Port size Wetted parts material Temperature range (°C) Pressure range (MPa) Required flow rate Note 10) (50/60 Hz) (L/min) Port size Wetted parts material Power supply Breaker capacity (A) Rated current (A) Alarm Communications Weight Note 11) (kg) Safety standards Water-cooled refrigeration R404A (HFC) PID control Temperature: 10 to 35°C, Humidity: 30 to 70%RH Model HRZ010-WS HRZ010-W1S HRZ010-W2S .20 to 90 10 to 60 ±0.1 (In cases when the circulating fluid discharge port and the return port are directly connected) 20 10 to 40 (With flow control function by inverter) Approx. 15 Approx. 16 Rc3/4 Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 0.3 to 0.7 15/15 Rc1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ±10% 30 Refer to page 1338. Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 1336 and 1337.) 165 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) 10 to 30 10 (at 20°C) 4.5 (at 20°C) Max. 0.40 (at 20 L/min) 25 9 (at 20°C) 2.5 (at 20°C) Max. 0.38 (at 20 L/min) 10 to 25 25 60% ethylene glycol aqueous solution Clear water, Deionozed water . .20 to 40°C: Fluorinert. FC-3283/GALDENR HT135 . 20 to 90°C: Fluorinert. FC-40/GALDENR HT200 10 (at 20°C) 5.0 (at 20°C) Max. 0.72 (at 20 L/min) 26 Electrical system Cooling water system Circulating fluid system 1332