SEMATECH S2-93, S8-95 SEMI Standard S2-0703, S8-0701, F47-0200 R Series HRZ More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump. �� Type of Fluorinated fluids/Ethylene glycol aqueous solution/ circulating fluid: Clear water, Deionized water �� Temperature .range setting: 20 to 40°C/20 to 90°C/.20 to 90°C �� Cooling 1 kW/2 kW/4 kW/8 kW/10 kW to Max.15 kW capacity: �� Temperature stability: ±0.1°C �� Refrigerant: R404A (HFC)/R134a (HFC) Power consumption 1.1 kWh/h Facility water 2 L/min Inverter type Circulating Fluid Temperature Controller Refrigerated Thermo-chiller 1313 HRG HRS HRZD HRW HEC HEB HED HEA IDH HRZ